Fiber-optic ferrule-top nanomechanical resonator with multilayer graphene film

Compact ferrule-top nanomechanical resonators with multilayer graphene (MLG) diaphragms as vibrating elements are demonstrated. The resonators comprise a suspended MLG film supported by a ceramic ferrule with a bore diameter of ∼125 μm. The mechanical resonance of the graphene film is excited and detected by an all-fiber optical interrogation system. Based on a beam-shape graphene mechanical resonator, a force sensitivity of ∼3.8 fN/Hz1/2 was theoretically predicted. The integration of nanomechanical graphene film with optical fiber simplifies the excitation and interrogation of the resonator and would allow the development of practical fiber-optic sensors for force, mass, and pressure measurements.