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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
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A uniform approach to the description of multicenter bonding

Dariusz W Szczepanik1, Marcin Andrzejak, Karol Dyduch

  • 1Department of Theoretical Chemistry, Jagiellonian University, Ingardena 3, 30-060 Cracow, Poland. szczepad@chemia.uj.edu.pl.

Physical Chemistry Chemical Physics : PCCP
|August 22, 2014
PubMed

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