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Updated: Apr 25, 2026

Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
Optomechanical coupling between a multilayer graphene mechanical resonator and a superconducting microwave cavity
V Singh1, S J Bosman1, B H Schneider1
1Kavli Institute of NanoScience, Delft University of Technology, PO Box 5046, 2600 GA, Delft, The Netherlands.
Abstract:
The combination of low mass density, high frequency and high quality factor, Q, of mechanical resonators made of two-dimensional crystals such as graphene make them attractive for applications in force/mass sensing and exploring the quantum regime of mechanical motion. Microwave optomechanics with superconducting cavities offers exquisite position sensitivity and enables the preparation and detection of mechanical systems in the quantum ground state. Here, we demonstrate coupling between a multilayer graphene resonator with quality factors up to 220,000 and a high-Q superconducting cavity. Using thermomechanical noise as calibration, we achieve a displacement sensitivity of 17 fm Hz(-1/2). Optomechanical coupling is demonstrated by optomechanically induced reflection and absorption of microwave photons. We observe 17 dB of mechanical microwave amplification and signatures of strong optomechanical backaction. We quantitatively extract the cooperativity C, a characterization of coupling strength, from the measurement with no free parameters and find C = 8, which is promising for the quantum regime of graphene motion.
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