Replenish and relax: explaining logarithmic annealing in ion-implanted c-Si.

Laurent Karim Béland1, Yonathan Anahory1, Dries Smeets1

  • 1Regroupement Québécois sur les Matériaux de Pointe (RQMP), Département de physique, Université de Montréal, Case Postale 6128, Succursale Centre-ville, Montréal, Québec, H3C 3J7, Canada.

Physical Review Letters
|August 29, 2014
PubMed
Summary

Ion-damaged silicon undergoes structural relaxation via a two-step process. This involves unlocking energy barriers to release heat, leading to more stable configurations over time.

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