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Plasma-assisted Molecular Beam Epitaxy of N-polar InAlN-barrier High-electron-mobility Transistors
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Competitive growth mechanisms of AlN on Si (111) by MOVPE

Yuxia Feng1, Hongyuan Wei1, Shaoyan Yang1

  • 1Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Chinese Academy of Sciences, P. O. Box 912, Beijing 100083, People's Republic of China.

Scientific Reports
|September 19, 2014
PubMed

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