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Macroporous silicon for high-capacitance devices using metal electrodes.

Didac Vega1, Jordi Reina1, Ferran Martí1

  • 1Micro and Nanotechnology Research Group (MNT), Electronic Engineering Department (EEL), Universitat Politècnica de Catalunya (UPC), c/Jordi Girona 1-3, Campus Nord Mod. C4, 08034 Barcelona, Spain.

Nanoscale Research Letters
|September 23, 2014
PubMed
Summary

High-capacity energy storage devices using macroporous silicon were fabricated. These small devices offer large capacitance and are suitable for high-density integration, operating up to 10 kHz.

Keywords:
Electro-depositionElectrochemical etchingElectrodepositionElectroplatingEnergy storageHigh-density capacitorsMacroporous siliconPorous silicon

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Nanotechnology

Background:

  • Developing high-capacity energy storage is crucial for modern electronics.
  • Existing solutions often face limitations in size and integration density.
  • Macroporous silicon offers a promising platform for advanced energy storage.

Purpose of the Study:

  • To demonstrate high-capacity energy storage devices utilizing macroporous silicon.
  • To achieve high specific capacitance and absolute capacitance in small footprint devices.
  • To ensure suitability for high-density system integration.

Main Methods:

  • Fabrication of macroporous silicon structures via electrochemical etching.
  • Growth of a silicon dioxide insulating layer on macroporous silicon electrodes.
  • Filling pores with nickel using electroplating for the second electrode.
  • Utilizing standard microelectronics and MEMS techniques.

Main Results:

  • Achieved specific capacitances up to 100 nF/mm² and absolute capacitance over 15 μF.
  • Demonstrated devices with small footprints suitable for high-density integration.
  • Obtained low equivalent series resistance near 1 Ω.
  • Enabled device operation up to 10 kHz.

Conclusions:

  • Macroporous silicon is a viable material for high-performance energy storage devices.
  • The fabrication method allows for controlled, repeatable, and scalable device production.
  • These devices represent a significant advancement for integrated energy storage solutions.