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Updated: Apr 23, 2026

Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects
Published on: January 4, 2016
Complex surface chemistry of an otherwise inert solvent molecule: tetrahydrofuran on Si(001)
Gerson Mette1, Marcel Reutzel, Ruben Bartholomäus
1Fachbereich Physik und Zentrum für Materialwissenschaften, Philipps-Universität, 35032 Marburg (Germany); Current address: Physik-Institut, Universität Zürich, CH-8057 Zürich (Switzerland).
Abstract:
The reaction of tetrahydrofuran (THF), an otherwise inert solvent molecule, on Si(001) was experimentally studied in ultra-high vacuum. Using scanning tunneling microscopy (STM) and photoelectron spectroscopy at variable temperature, we could both isolate a datively bound intermediate state of THF on Si(001), as well as the final configuration that bridges two dimer rows of the Si(001) surface after ether cleavage. The latter configuration implies splitting of the OC bond, which is typically kinetically suppressed. THF thus exhibits a hitherto unknown reactivity on Si(001).

