Calibration-free quantitative surface topography reconstruction in scanning electron microscopy.

Area of Science:

• Materials Science
• Surface Metrology
• Microscopy

Background:

• Surface topography reconstruction is crucial for material characterization.
• Traditional methods often require complex equipment calibration.
• Scanning Electron Microscopy (SEM) provides high-resolution 2D images.

Purpose of the Study:

• To develop a simplified and reliable approach for 3D surface topography reconstruction from 2D SEM images.
• To avoid intricate calibration procedures for measuring equipment.

Main Methods:

• Utilizing digital image correlation (DIC) to compare SEM images acquired at various tilt angles.
• Developing and presenting the necessary mathematical equations, derivations, and solutions for the method.

Main Results:

• Demonstrated reliable surface topography reconstructions.
• Successfully illustrated the method with 3D reconstruction examples.
• Provided a discussion on critical experimental parameters influencing the results.

Conclusions:

• The proposed DIC-based method offers a robust and simplified approach to 3D surface reconstruction from SEM.
• The technique bypasses the need for precise knowledge of rotation parameters, reducing calibration complexity.
• This method enhances the accessibility and reliability of surface topography analysis.