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    This study presents an automatic method to reduce nonlinearities in capacitive micromachined ultrasonic transducers (cMUTs) for medical ultrasound. The novel approach effectively cancels harmonic components, improving transducer performance for broader bandwidth imaging.

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    Area of Science:

    • Ultrasound Transducer Technology
    • Nonlinear Acoustics
    • Biomedical Engineering

    Background:

    • Capacitive micromachined ultrasonic transducers (cMUTs) offer an alternative to piezoelectric transducers but exhibit native nonlinear behavior.
    • This nonlinearity limits their application in medical ultrasound, particularly for advanced imaging techniques requiring broad bandwidth.
    • Existing methods to mitigate nonlinearity are often manual and only address second harmonic components.

    Purpose of the Study:

    • To develop an automatic pre-compensation method for cMUTs that reduces all harmonic nonlinearities.
    • To overcome the limitations of existing methods, which are not automatic and only reduce the second harmonic.
    • To enable broader bandwidth ultrasound imaging by minimizing nonlinear distortion.

    Main Methods:

    • Generalization of presetting methods to reduce all nonlinearities in cMUT output.
    • Development of an automatic pre-compensation technique applicable to any excitation waveform.
    • Utilizing nonlinear modeling of harmonic components via Volterra decomposition, with parameter evaluation by the Nelder-Mead algorithm.

    Main Results:

    • The proposed automatic pre-compensation method successfully reduced nonlinear components in cMUT output.
    • Nonlinear components were reduced by up to 21.2 dB in tests on a linear array element.
    • The method demonstrated feasibility across various excitation types used in encoded ultrasound imaging.

    Conclusions:

    • The developed automatic pre-compensation method effectively reduces nonlinearities in cMUTs, addressing limitations of previous techniques.
    • This advancement supports the use of cMUTs in medical ultrasound applications requiring broader bandwidth and reduced harmonic distortion.
    • The method's automatic nature and ability to reduce all harmonic components enhance its practical applicability in advanced ultrasound imaging.