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Note: Differential amplified high-resolution tilt angle measurement system.

Shijie Zhao1, Yan Li1, Enyao Zhang1

  • 1The State Key Lab of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China.

The Review of Scientific Instruments
|October 3, 2014
PubMed
Summary

This study introduces a novel tilt angle measurement system with high resolution and stability. It significantly reduces noise using a two-step amplification process with MEMS inclinometers.

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Area of Science:

  • Instrumentation and Measurement
  • Sensor Technology
  • Signal Processing

Background:

  • Accurate tilt angle measurement is crucial for various scientific and engineering applications.
  • Existing systems often suffer from electrical interference and common-mode noise, limiting resolution and stability.
  • The need for high-precision, stable tilt sensing persists in demanding environments.

Purpose of the Study:

  • To present a novel high-resolution tilt angle measurement system.
  • To demonstrate a unique signal amplification technique for enhanced accuracy and noise reduction.
  • To achieve superior long-term stability in tilt angle measurements.

Main Methods:

  • A two-step signal amplification process was employed.
  • The first step utilized an operational amplifier.
  • The second step involved differential amplification using two Micro-Electro-Mechanical Systems (MEMS)-based inclinometers.
  • The system was calibrated using an autocollimator.

Main Results:

  • The system achieved an extremely high resolution of 2 arc seconds.
  • Measurement accuracy was determined to be better than ±1.5 arc seconds.
  • Short-term and long-term zero-drift errors were below ±1 arc second and ±2 arc seconds, respectively.
  • The novel design substantially reduced electrical interference and common-mode noise.

Conclusions:

  • The developed tilt angle measurement system offers exceptional resolution and long-term stability.
  • The two-step amplification with MEMS inclinometers effectively mitigates noise and interference.
  • This system provides a reliable solution for high-precision tilt sensing applications.