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A 32 × 32 optical phased array using polysilicon sub-wavelength high-contrast-grating mirrors.

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    |October 17, 2014
    PubMed
    Summary
    This summary is machine-generated.

    We developed microelectromechanical systems (MEMS) optical phased arrays (OPAs) using high-contrast-grating (HCG) mirrors. These OPAs achieve microsecond response times and high fill factors for advanced optical applications.

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    Area of Science:

    • Optoelectronics
    • Microelectromechanical Systems (MEMS)
    • Nanophotonics

    Background:

    • Optical phased arrays (OPAs) are crucial for beam steering applications.
    • Traditional OPAs face challenges with mirror weight, curvature, and response time.
    • High-contrast-grating (HCG) mirrors offer potential solutions for OPA performance enhancement.

    Purpose of the Study:

    • To design and fabricate MEMS-actuated 32x32 OPAs.
    • To utilize HCG mirrors to improve OPA performance metrics.
    • To characterize the optical and mechanical properties of the developed OPAs.

    Main Methods:

    • Fabrication of HCG mirrors with specific grating dimensions (400 nm thickness, 1250 nm pitch, 570 nm bar width).
    • Integration of HCG mirrors into a 32x32 OPA structure with 20x20 μm pixels.
    • Electrostatic actuation for OPA control and characterization of field of view and response time.

    Main Results:

    • Achieved a high fill factor of 85% with a total aperture of 702x702 μm2.
    • Demonstrated a broad reflection band with peak reflectivity of 99.9% at 1550 nm.
    • Obtained a microsecond response time of 3.8 μs, aligning with HCG mirror resonance frequency.

    Conclusions:

    • The developed MEMS-actuated OPAs using HCG mirrors show excellent performance characteristics.
    • HCG mirrors effectively reduce mirror weight and mitigate temperature-dependent curvature issues.
    • These OPAs are suitable for applications requiring fast and precise optical beam steering.