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Coded aperture detector: an image sensor with sub 20-nm pixel resolution.

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    A new coded aperture detector uses uniformly redundant arrays (URAs) for advanced image sensing. This novel sensor offers high-fidelity imaging comparable to CCDs, suitable for EUV and soft X-ray applications.

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    Area of Science:

    • Optics and Photonics
    • Image Sensing Technology
    • Nanofabrication

    Background:

    • Traditional image sensors like CCDs have limitations in certain spectral ranges.
    • The need for high-resolution, adaptable imaging systems is growing across scientific disciplines.

    Purpose of the Study:

    • To introduce a novel coded aperture detector utilizing Uniformly Redundant Arrays (URAs).
    • To demonstrate the feasibility and performance of this new image sensing technology.
    • To highlight its potential for applications in extreme ultraviolet (EUV) and soft X-ray imaging.

    Main Methods:

    • Development of a coded aperture detector employing URAs with tunable parameters.
    • Lateral scanning of the coded aperture at the image plane of an optical system.
    • Measurement of transmitted intensity using a photodiode and digital image reconstruction via convolution.

    Main Results:

    • Successful proof-of-principle optical prototype demonstrating high-fidelity image sensing.
    • Performance comparable to Charge-Coupled Device (CCD) imagers achieved.
    • Fabrication of a 20-nm half-pitch URA suitable for EUV and soft X-ray wavelengths.

    Conclusions:

    • The coded aperture detector represents a significant advancement in image sensing technology.
    • This novel sensor offers a viable alternative for high-resolution imaging in EUV and soft X-ray regimes.
    • The customizable nature of the URA sensor allows for adaptation to various photon energy ranges and resolution requirements.