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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
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Improving accuracy in period measurement of gratings with multiple diffraction orders
Applied Optics
|October 17, 2014
Abstract:
Determining the period of a grating generating multiple diffraction orders from the data of diffraction angle measurement is not an easy task, mainly because of positioning error. We propose a novel technique, i.e., numerically adjusting the specimen position, to solve the problem. The procedure alone would reduce the amount of uncertainty by two orders of magnitude.
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