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Related Experiment Video

Updated: Apr 22, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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High speed optical phased array using high contrast grating all-pass filters.

Weijian Yang, Tianbo Sun, Yi Rao

    Optics Express
    |October 17, 2014
    PubMed
    Summary

    We developed a fast optical phased array using tunable filters and microelectromechanical gratings. This technology enables rapid beam steering for advanced optical systems.

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    Area of Science:

    • Photonics and Optical Engineering
    • Microelectromechanical Systems (MEMS)

    Background:

    • Optical phased arrays (OPAs) are crucial for beam steering applications.
    • Existing OPAs often face limitations in tuning speed and efficiency.

    Purpose of the Study:

    • To report a high-speed 8x8 optical phased array.
    • To demonstrate efficient phase tuning using novel microelectromechanical components.

    Main Methods:

    • Utilized tunable 1550 nm all-pass filters.
    • Employed ultrathin high contrast gratings (HCGs) as microelectromechanical-actuated reflectors.
    • Achieved phase tuning via HCG actuation.

    Main Results:

    • Demonstrated highly efficient phase tuning (1.7 π) with low actuation voltage (10 V) and displacement (50 nm).
    • The microelectromechanical HCG structure enabled a high phase tuning speed exceeding 0.5 MHz.
    • Successfully demonstrated beam steering with the 8x8 optical phased array.

    Conclusions:

    • The developed optical phased array offers high speed and efficiency for beam steering.
    • The integration of tunable all-pass filters and microelectromechanical HCGs is a promising approach for advanced photonic devices.