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Updated: Apr 22, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Dual-plane in-line digital holography based on liquid crystal on silicon spatial light modulator
Abstract:
A dual-plane in-line digital holographic method is proposed with a liquid crystal on silicon (LCOS) spatial light modulator (SLM) for recording holograms at two slightly displaced planes. The computer-generated chirp-like complex reflectance is displayed on the LCOS SLM to adapt the object beam at two planes for recording two holograms processed to eliminate the DC term and twin image accurately; no mechanical components or manual operation during data acquisition is required. The proposed approach improves the speed, accuracy, and stability of the experiment. Computer simulation and experiments for both amplitude and phase objects are carried out to validate the proposed method.
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