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Updated: Apr 21, 2026

Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition
Published on: July 26, 2016
Brandon R Sutherland1, Sjoerd Hoogland, Michael M Adachi
1Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario, M5S 3G4, Canada.
Researchers developed a new method for depositing perovskite thin films using atomic layer deposition (ALD). This technique offers precise thickness control and promising optical properties for advanced material applications.
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