Liquid sensor based on high-Q slot photonic crystal cavity in silicon-on-insulator configuration

We present the realization of an optical sensor based on an infiltrated high-Q slot photonic crystal cavity in a nonfreestanding membrane configuration. Successive infiltrations by liquids with refractive indices ranging from 1.345 to 1.545 yield a sensitivity S of 235 nm/RIU (refractive index unit), while the Q-factor is comprised between 8000 and 25,000, giving a sensor figure of merit up to 3700. This sensor has a detection limit of 1.25×10⁻⁵. The operation of this device on a silicon-on-insulator (SOI) substrate allows a straightforward integration in the silicon photonics platform, while providing a compliant mechanical stability.