Experimental investigation of double-groove grating satisfying total internal reflection condition

We experimentally demonstrate a TiO(2) double-groove grating coupler with two different groove widths on a SiO(2) substrate in the visible region. Tolerance investigations based on Bloch-mode profiles in the grating and coupling strengths between the Bloch modes and diffraction orders reveal that the transmission performance is robust when one of the paired ridges is narrow enough (60 nm and less) considering a typical nanofabrication accuracy. Moreover, the ridge shape affects weakly the transmission performance due to the non-resonance operation of our dielectric device. Such tolerance investigations together with current nanofabrication technology enable us to accomplish a 70% efficiency for coupling the normal incident light into the + 1st order transmission diffraction satisfying the total internal reflection condition at a 640 nm wavelength of operation.