Diffraction theory of high numerical aperture subwavelength circular binary phase Fresnel zone plate

An analytical model of vector formalism is proposed to investigate the diffraction of high numerical aperture subwavelength circular binary phase Fresnel zone plate (FZP). In the proposed model, the scattering on the FZP's surface, reflection and refraction within groove zones are considered and diffraction fields are calculated using the vector Rayleigh-Sommerfeld integral. The numerical results obtained by the proposed phase thick FZP (TFZP) model show a good agreement with those obtained by the finite-difference time-domain (FDTD) method within the effective extent of etch depth. The optimal etch depths predicted by both methods are approximately equal. The analytical TFZP model is very useful for designing a phase and hybrid amplitude-phase FZP with high-NA and short focal length.