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Updated: Apr 20, 2026

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium
Published on: December 16, 2011
A Evren Özçam1, Richard J Spontak, Jan Genzer
1Department of Chemical & Biomolecular Engineering North Carolina State University Raleigh, North Carolina 27695-7905, United States.
Researchers developed a versatile silicone copolymer coating by chemically coupling trichlorosilane (TCS) to poly(vinylmethylsiloxane) (PVMS). This functional coating on poly(dimethylsiloxane) substrates allows tunable mechanical properties for diverse applications.
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