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Updated: Apr 20, 2026

In Situ SIMS and IR Spectroscopy of Well-defined Surfaces Prepared by Soft Landing of Mass-selected Ions
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Design and construction of a research atomic layer deposition system for in situ infrared and electron spectroscopies

V M Bermudez1

  • 1Electronics Science and Technology Division, Naval Research Laboratory, Washington, DC 20375, USA.

The Review of Scientific Instruments
|November 29, 2014
PubMed

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