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Note: development of high speed confocal 3D profilometer.

Kar Tien Ang1, Zhong Ping Fang2, Arthur Tay1

  • 1Electrical and Computer Engineering Department, National University of Singapore, 4 Engineering Drive 3, Singapore 117576.

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|November 29, 2014
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Summary
This summary is machine-generated.

A novel high-speed confocal 3D profilometer achieves rapid whole-surface topography measurement using chromatic confocal technology and a spinning Nipkow disk. This system enhances vertical resolution for accurate surface analysis.

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Area of Science:

  • Optical Metrology
  • Surface Characterization
  • Instrumentation Science

Background:

  • Traditional 3D surface measurement techniques can be time-consuming.
  • High-speed, high-resolution surface topography analysis is crucial for various scientific and industrial applications.

Purpose of the Study:

  • To develop and test a high-speed confocal 3D profilometer.
  • To achieve rapid, whole-surface topography measurement with enhanced vertical resolution.

Main Methods:

  • Utilized chromatic confocal technology combined with a spinning Nipkow disk.
  • Employed a novel vector projection technique for enhanced vertical resolution.
  • Retrieved surface height information from RGB color data.

Main Results:

  • Developed a prototype system capable of measuring whole surface topography in under 0.3 seconds.
  • Demonstrated enhanced vertical resolution through the vector projection technique.
  • Verified measurement accuracy using various test samples.

Conclusions:

  • The developed high-speed confocal 3D profilometer offers a fast and accurate solution for surface topography measurement.
  • The combination of chromatic confocal technology, Nipkow disk, and vector projection significantly improves measurement speed and resolution.