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Updated: Apr 20, 2026

Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments
Published on: January 28, 2021
Note: development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source
Thanh Hung Dinh1, Yuhei Suzuki1, Ryoichi Hirose2
1Department of Advanced Interdisciplinary Sciences and Center for Optical Research (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585, Japan.
Abstract:
We report on production of volume-limited dot targets based on electron beam lithographic and sputtering technologies for use in efficient high brightness extreme ultraviolet microplasma sources. We successfully produced cylindrical tin (Sn) targets with diameters of 10, 15, and 20 μm and a height of 150 nm. The calculated spectrum around 13.5 nm was in good agreement with that obtained experimentally.

