Note: development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source

Thanh Hung Dinh1, Yuhei Suzuki1, Ryoichi Hirose2

  • 1Department of Advanced Interdisciplinary Sciences and Center for Optical Research (CORE), Utsunomiya University, Yoto 7-1-2, Utsunomiya, Tochigi 321-8585, Japan.