Modelling the inelastic scattering of fast electrons
L J Allen1, A J D Alfonso1, S D Findlay2
1School of Physics, University of Melbourne, Parkville, Victoria 3010, Australia.
Ultramicroscopy
|December 4, 2014
Summary
Atomic resolution electron microscopy utilizes inelastic electron scattering. This review details the evolution of scattering models and introduces the μSTEM software for simulating imaging modes in electron microscopy.
Area of Science:
- Electron Microscopy
- Materials Science
- Physics
Background:
- Atomic resolution imaging using inelastic electron scattering is a mature technique.
- Pioneering theoretical work by Harald Rose emphasized phase and dynamic form factors.
- Advancements in modeling and numerical implementation have been crucial.
Purpose of the Study:
- To review the development of inelastic scattering modeling in electron microscopy.
- To present the numerical implementation of these models.
- To introduce the μSTEM software package for simulations.
Main Methods:
- Review of theoretical and computational advancements in inelastic electron scattering.
- Development and implementation of numerical models.
- Utilizing the μSTEM software for simulating imaging modes.
Main Results:
- The modeling of inelastic scattering has significantly evolved.
- Numerical implementations are now robust and widely applicable.
- The μSTEM software enables simulation of various inelastic scattering imaging modes.
Conclusions:
- Inelastic electron scattering is a powerful tool for atomic resolution imaging.
- The μSTEM software provides a valuable resource for researchers in electron microscopy.
- Continued development in modeling and simulation will further enhance imaging capabilities.
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