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Updated: Apr 19, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Application of RF-MEMS-based split ring resonators (SRRs) to the implementation of reconfigurable stopband filters: a
Ferran Martín1, Jordi Bonache2
1CIMITEC, Departament d'Enginyeria Electrònica, Universitat Autònoma de Barcelona, Bellaterra (Barcelona) 08193, Spain. ferran.martin@uab.cat.
Abstract:
In this review paper, several strategies for the implementation of reconfigurable split ring resonators (SRRs) based on RF-MEMS switches are presented. Essentially three types of RF-MEMS combined with split rings are considered: (i) bridge-type RF-MEMS on top of complementary split ring resonators CSRRs; (ii) cantilever-type RF-MEMS on top of SRRs; and (iii) cantilever-type RF-MEMS integrated with SRRs (or RF-MEMS SRRs). Advantages and limitations of these different configurations from the point of view of their potential applications for reconfigurable stopband filter design are discussed, and several prototype devices are presented.
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