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Updated: Apr 19, 2026

Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
Published on: March 24, 2023
Zinc oxide nanowire-poly(methyl methacrylate) dielectric layers for polymer capacitive pressure sensors
Yan-Sheng Chen1, Gen-Wen Hsieh, Shih-Ping Chen
1Institute of Imaging and Biomedical Photonics, ‡Institute of Lighting and Energy Photonics, and §Institute of Photonic System, National Chiao Tung University , No. 301, Gaofa Third Road, Guiren District, Tainan 71150, Taiwan, R.O.C.
Abstract:
Polymer capacitive pressure sensors based on a dielectric composite layer of zinc oxide nanowire and poly(methyl methacrylate) show pressure sensitivity in the range of 2.63 × 10(-3) to 9.95 × 10(-3) cm(2) gf(-1). This represents an increase of capacitance change by as much as a factor of 23 over pristine polymer devices. An ultralight load of only 10 mg (corresponding to an applied pressure of ∼0.01 gf cm(-2)) can be clearly recognized, demonstrating remarkable characteristics of these nanowire-polymer capacitive pressure sensors. In addition, optical transmittance of the dielectric composite layer is approximately 90% in the visible wavelength region. Their low processing temperature, transparency, and flexible dielectric film makes them a highly promising means for flexible touching and pressure-sensing applications.

