Transmission Electron Microscopy
Overview of Electron Microscopy
Preparation of Samples for Electron Microscopy
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Seiji Takeda1, Yasufumi Kuwauchi1, Hideto Yoshida1
1Nanoscience and Nanotechnology Center, Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan.
Environmental transmission electron microscopy (ETEM) with a Cs-corrector achieves atomic resolution for in-situ catalyst studies. This technique reveals atomic-scale structural information and reaction mechanisms in catalytic materials.
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