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Updated: Apr 19, 2026

An Atmospheric Pressure Plasma Setup to Investigate the Reactive Species Formation
Published on: November 3, 2016
An atmospheric-pressure, high-aspect-ratio, cold micro-plasma
11] State Key Laboratory of Advanced Electromagnetic Engineering and Technology, Huazhong University of Science and Technology, Wuhan, Hubei 430074, P.R. China [2] IFSA Collaborative Innovation Center, Shanghai Jiao Tong University, Shanghai 200240, P.R. China.
This study reports on atmospheric pressure nonequilibrium argon micro-plasma. High electron densities and room gas temperatures were achieved in a 3 μm radius micro-tube plasma.
Area of Science:
- Physics
- Plasma Science
- Microfluidics
Background:
- Micro-plasmas offer unique properties for various applications.
- Generating and characterizing atmospheric pressure plasmas at the microscale presents significant challenges.
Purpose of the Study:
- To report the generation of an atmospheric pressure nonequilibrium argon micro-plasma.
- To characterize the plasma properties within a micro-tube.
Main Methods:
- Generation of argon micro-plasma in a micro-tube (3 μm radius, 2.7 cm length).
- Estimation of electron density via Ar emission line broadening.
- Determination of electron temperature using a collisional-radiative (CR) model.
- Measurement of gas temperature from N2 rotational spectrum.
Main Results:
- Achieved electron densities as high as 3 × 10^16 cm⁻³.
- Electron temperature of 1.5 eV and gas temperature near room temperature.
- Sheath thickness comparable to the plasma radius.
- Ignition voltage increased by an order of magnitude when tube radius decreased from 1 mm to 3 μm.
Conclusions:
- Successful generation of atmospheric pressure nonequilibrium argon micro-plasma.
- Demonstrated high electron densities and low gas temperatures at the microscale.
- Highlighted the significant impact of micro-scale confinement on plasma ignition voltage.
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