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The contrast-to-noise ratio for image quality evaluation in scanning electron microscopy
1JEOL Technics Ltd., 2-6-38 Musashino, Akishima-shi, Tokyo, Japan.
Abstract:
The contrast-to-noise ratio (CNR) is presented and characterized as a tool for quantitative noise measurement of scanning electron microscope (SEM) images. Analogies as well as differences between the CNR and the widely used signal-to-noise ratio (SNR) are analytically and experimentally investigated. With respect to practical SEM image evaluation using the contrast-to-noise ratio, a standard specimen and an evaluation program are presented.
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