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Quantitative Analysis01:12

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Quantitative analysis is a technique for measuring the amount of specific constituents in a sample. When the sample's composition is unknown, qualitative analysis is performed first to identify its components, which ensures that the correct substances are measured during the quantitative phase.
In quantitative analysis, two key measurements are made: the sample quantity and a property proportional to the amount of the analyte (the substance being analyzed). This forms the basis of the...
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On the quantitativeness of EDS STEM.

N R Lugg1, G Kothleitner2, N Shibata1

  • 1Institute of Engineering Innovation, The University of Tokyo, 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan.

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Summary

Quantitative chemical mapping using energy dispersive X-ray spectroscopy (EDS) in scanning transmission electron microscopy (STEM) is challenging due to electron scattering. Tilting the specimen or probe, combined with precession averaging, can improve accuracy for elemental analysis.

Keywords:
Chemical mappingEnergy-dispersive X-ray spectroscopy (EDS)Scanning transmission electron microscopy (STEM)Tilting

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Energy dispersive X-ray spectroscopy (EDS) in scanning transmission electron microscopy (STEM) offers atomic-resolution elemental analysis.
  • Current applications are primarily qualitative, lacking absolute scales for quantitative elemental mapping.
  • Extracting quantitative specimen information is complex due to electron probe scattering (elastic and inelastic).

Purpose of the Study:

  • To theoretically investigate how electron scattering affects quantitative EDS STEM mapping.
  • To demonstrate simulation-based methods for improving quantitative analysis.
  • To explore specimen tilting and precession averaging as solutions.

Main Methods:

  • Theoretical exploration of elastic and thermal scattering effects on EDS STEM data.
  • Simulations to model the impact of specimen tilting on scattering.
  • Discussion of precession-averaged EDS STEM mapping as a potential remedy.

Main Results:

  • Elastic and thermal scattering significantly confound quantitative information extraction in EDS STEM.
  • Specimen tilting can reduce scattering effects and enable quantitative analysis.
  • Precession averaging is proposed to mitigate drawbacks of tilted specimen analysis.

Conclusions:

  • Quantitative elemental mapping via EDS STEM requires addressing electron scattering challenges.
  • Specimen tilting offers a pathway to quantitative analysis, albeit with resolution trade-offs.
  • Precession averaging shows promise for enhancing quantitative EDS STEM accuracy and resolution.