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N R Lugg1, G Kothleitner2, N Shibata1
1Institute of Engineering Innovation, The University of Tokyo, 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan.
Quantitative chemical mapping using energy dispersive X-ray spectroscopy (EDS) in scanning transmission electron microscopy (STEM) is challenging due to electron scattering. Tilting the specimen or probe, combined with precession averaging, can improve accuracy for elemental analysis.
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