Self-consistent iteration procedure in analyzing reflectivity and spectroscopic ellipsometry data of multilayered

T C Asmara1, I Santoso1, A Rusydi1

  • 1NUSNNI-NanoCore, Singapore Synchrotron Light Source, and Department of Physics, National University of Singapore, Singapore 117576.

Summary

This study introduces a new method to analyze multilayered materials, enabling the separation of optical properties for each layer. The technique was successfully applied to LaAlO3/SrTiO3 heterostructures, distinguishing interface effects.

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