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Self-consistent iteration procedure in analyzing reflectivity and spectroscopic ellipsometry data of multilayered
T C Asmara1, I Santoso1, A Rusydi1
1NUSNNI-NanoCore, Singapore Synchrotron Light Source, and Department of Physics, National University of Singapore, Singapore 117576.
The Review of Scientific Instruments
|January 3, 2015
Summary
This study introduces a new method to analyze multilayered materials, enabling the separation of optical properties for each layer. The technique was successfully applied to LaAlO3/SrTiO3 heterostructures, distinguishing interface effects.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Optics
Background:
- Reflectivity in multilayered materials is influenced by the dielectric functions of all layers.
- Quantum states at interfaces can alter material optical properties, necessitating detailed analysis.
Purpose of the Study:
- To present a versatile method for extracting and separating the complex dielectric function of individual layers in multilayered systems.
- To apply this method to a LaAlO3/SrTiO3 heterostructure as a case study.
Main Methods:
- A self-consistent iteration procedure is detailed for analyzing multilayered systems.
- The method extracts the complex dielectric function for each constituent layer.
Main Results:
- The complex dielectric function of individual layers in a multilayered system can be successfully separated.
- The method distinguished interface effects from the LaAlO3 film and SrTiO3 substrate in the heterostructure case study.
Conclusions:
- The developed self-consistent iteration procedure is effective for analyzing complex multilayered materials.
- This method is applicable to various multilayered systems with differing numbers of layers.

