Design of a novel passive flexure-based mechanism for microelectromechanical system optical switch assembly

In microelectromechanical system (MEMS) optical switch assembly, the collision always exists between the optical fiber and the edges of the U-groove due to the positioning errors between them. It will cause the irreparable damage since the optical fiber and the silicon-made U-groove are usually very fragile. Typical solution is first to detect the positioning errors by the machine vision or high-resolution sensors and then to actively eliminate them with the aid of the motion of precision mechanisms. However, this method will increase the cost and complexity of the system. In this paper, we present a passive compensation method to accommodate the positioning errors. First, we study the insertion process of the optical fiber into the U-groove to analyze all possible positioning errors as well as the conditions of successful insertion. Then, a novel passive flexure-based mechanism based on the remote center of compliance concept is designed to satisfy the required insertion condition. The pseudo-rigid-body-model method is utilized to calculate the stiffness of the mechanism along the different directions, which is verified by finite element analysis (FEA). Finally, a prototype of the passive flexure-based mechanism is fabricated for performance tests. Both FEA and experimental results indicate that the designed mechanism can be used to the MEMS optical switch assembly.