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Updated: Apr 19, 2026

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
Carbon nanotube network varactor
A A Generalov1, I V Anoshkin, M Erdmanis
1Department of Radio Science and Engineering, Aalto University School of Electrical Engineering, Otakaari 5A, FI-02150, Espoo, Finland.
Abstract:
Microelectromechanical system (MEMS) varactors based on a freestanding layer of single-walled carbon nanotube (SWCNT) films were designed, fabricated and tested. The freestanding SWCNT film was employed as a movable upper patch in the parallel plate capacitor of the MEMS. The measurements of the SWCNT varactors show very high tunability, nearly 100%, of the capacitance with a low actuation voltage of 10 V. The functionality of the varactor is improved by implementing a flexible nanocellulose aerogel filling.
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