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Performance comparison of cross-like Hall plates with different covering layers
Fei Lyu1, Zhenyan Zhang2, Eng-Huat Toh3
1School of Electronic Science & Engineering, Nanjing University, Nanjing 210093, China. lvfeieric@gmail.com.
Abstract:
This paper studies the effects of the covering layers on the performance of a cross-like Hall plate. Three different structures of a cross-like Hall plate in various sizes are designed and analyzed. The Hall plate sensitivity and offset are characterized using a self-built measurement system. The effect of the P-type region over the active area on the current-related sensitivity is studied for different Hall plate designs. In addition, the correlation between the P-type covering layer and offset is analyzed. The best structure out of three designs is determined. Besides, a modified eight-resistor circuit model for the Hall plate is presented with improved accuracy by taking the offset into account.
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