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Continuous measurement of optical surfaces using a line-scan interferometer with sinusoidal path length modulation.

Holger Knell, Sören Laubach, Gerd Ehret

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    This study introduces a rapid method for measuring rotationally symmetric optical surfaces using a line scanning interferometer. The technique enables precise continuous measurement through advanced sensor and positioning systems.

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    Area of Science:

    • Optical Engineering
    • Metrology

    Background:

    • Accurate measurement of optical surfaces is crucial for various applications.
    • Existing methods may lack speed or continuous measurement capabilities for complex surfaces.

    Purpose of the Study:

    • To develop and demonstrate a fast, continuous measurement approach for rotationally symmetric optical surfaces.
    • To validate the measurement and stitching concept using a five-axis system.

    Main Methods:

    • Utilized a line scanning interferometer with sinusoidal optical path length modulation.
    • Employed a five-axis system with a high-precision rotational table for specimen and sensor positioning.
    • Discussed the calibration procedures for the line sensor and the scanning/positioning system.

    Main Results:

    • Successfully demonstrated continuous measurement of optical surfaces.
    • Presented proof-of-principle results for a rotational symmetric sinusoidal structure.
    • Showcased measurements of a spherical lens with moderate slope, validating the stitching concept.

    Conclusions:

    • The presented approach offers a fast and effective method for continuous measurement of rotationally symmetric optical surfaces.
    • The integration of a line scanning interferometer and a five-axis system provides high precision and flexibility.
    • This technique is suitable for metrology applications requiring accurate characterization of optical components.