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Updated: Apr 18, 2026
Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining
Jintian Lin1, Yingxin Xu2, Zhiwei Fang3
11] State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China [2] University of Chinese Academy of Sciences, Beijing 100049, China.
Abstract:
We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.
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