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A compact two-dimensional laser scanner based on piezoelectric actuators.

Chen Wei1, Chen Sihai2, Luo Dong1

  • 1School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China.

The Review of Scientific Instruments
|February 2, 2015
PubMed
Summary
This summary is machine-generated.

A novel compact two-dimensional laser scanner utilizes piezoelectric actuators for high accuracy and structural compactness. This innovative design achieves precise linear scanning with reduced nonlinearity, making it suitable for various applications.

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Area of Science:

  • Optics and Photonics
  • Mechanical Engineering
  • Materials Science

Background:

  • Accurate and compact laser scanning systems are crucial for applications in imaging, metrology, and optical systems.
  • Traditional scanners often face limitations in size, accuracy, or scanning speed.
  • Piezoelectric actuators offer high precision and fast response times for micro-positioning tasks.

Purpose of the Study:

  • To design and prototype a compact two-dimensional (2D) single-mirror laser scanner with high accuracy.
  • To investigate the mechanical structure and 2D tilt principle for optimal performance.
  • To evaluate the scanner's linearity and scanning speed capabilities.

Main Methods:

  • A novel scanner architecture employing three parallel, staggered piezoelectric actuators in a triangular base configuration.
  • Analysis of the mechanical structure and 2D tilt principle.
  • Experimental testing of the prototype scanner, including resonance frequency and linearity measurements.
  • Implementation of hysteresis compensation for improved accuracy.

Main Results:

  • The scanner prototype demonstrates structural compactness and close drive axes.
  • Achieved optical angles of 2.558° (x-axis) and 4.495° (y-axis) with resonance frequencies of 1036.8 Hz (x-axis) and 654.0 Hz (y-axis).
  • Hysteresis compensation reduced nonlinearity to ±0.25% (x-axis) and ±0.3% (y-axis).
  • Open-loop control enabled linear scanning at several hundred hertz.

Conclusions:

  • The designed compact 2D single-mirror laser scanner offers high accuracy and structural advantages.
  • The piezoelectric actuator configuration and asymmetric structure contribute to its performance.
  • The scanner's reduced nonlinearity and capability for high-speed linear scanning make it a promising solution for advanced optical systems.