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Updated: Apr 17, 2026

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
Published on: January 9, 2014
Kyoung G Lee1, Sujeong Shin, Byeong Il Kim
1Department of Nano Bio Research, National Nanofab Center, 291 Daehak-ro, Yuseong-gu, Daejeon 305-806, Republic of Korea. sjlee@nnfc.re.kr tjlee@nnfc.re.kr.
A novel self-balancing jig enables precise ultrasonic bonding of plastic microfluidic devices with heterogeneous microstructures. This method prevents leakage and allows for selective microbead filtering, advancing microfluidic applications.
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