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Updated: Apr 17, 2026

Niobium Oxide Films Deposited by Reactive Sputtering: Effect of Oxygen Flow Rate
Published on: September 28, 2019
Sustainable synthesis of niobia thin films with open mesopore channels
Kenji Saito1, Yuki Sato, Shohei Okuyama
1Department of Materials Science and Technology, Faculty of Engineering, Niigata University , 8050 Ikarashi-2, Niigata 950-2181, Japan.
Abstract:
The current approaches to electrochemically synthesizing valve metal-derived nanochannel films with longitudinal nanospaces aligned at a right angle to planar substrates rely on highly toxic fluoride compounds and require severe reaction conditions. Herein, we report on a fluoride-free, room-temperature electrochemical synthesis of a genuine mesoporous niobia thin film from the parent metal. The electrochemical reaction is driven by only a 1 V bias with respect to a Pt counter electrode in an aqueous solution. The solution contained an inexpensive, less toxic potassium hydroxide, and the reaction produced favorable byproducts, namely, recyclable K8Nb6O19 and H2.
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