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Crossed ring anchored disk resonator for self-alignment of the anchor

Masoud Baghelani1, Habib Badri Ghavifekr1, Afshin Ebrahimi1

  • 1Department of Electrical Engineering, Sahand University of Technology, Sahand New Town, P.O. Box 51335-1996, Tabriz, Iran.

Journal of Advanced Research
|February 17, 2015
PubMed

Keywords:
Insertion lossMisalignmentQuality factorRF MEMS resonatorRing shaped anchorSelf-alignment

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