Atmospheric pressure PECVD nanoparticles: mechanism of nanoparticle self-organisation into micron sized fractal

M V Mishin1, K Y Zamotin, V S Protopopova

  • 1Department of Physical Chemistry and Technology of Microsystem Devices, Saint Petersburg State Polytechnical University, Polytechnicheskaya st. 29, Saint Petersburg, 195251, Russia. m.v.mishin.spbstu@gmail.com.

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