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Large-scale plasma patterning of transparent graphene electrode on flexible substrates
Ji Hye Kim1, Euna Ko, Joonki Hwang
1Department of Bionano Engineering, ‡Department of Chemical Engineering, and §Department of Materials Engineering, Hanyang University , Ansan 425-791, South Korea.
Langmuir : the ACS Journal of Surfaces and Colloids
|February 19, 2015
Summary
Researchers developed a scalable method for flexible graphene electrodes using oxygen plasma etching. This technique allows for reproducible patterning of graphene, offering a promising alternative to indium tin oxide for transparent electronics.
Area of Science:
- Materials Science
- Nanotechnology
- Electronics Engineering
Background:
- Graphene is a promising 2D material for flexible electronics, offering an alternative to indium tin oxide (ITO) for transparent electrodes.
- Current fabrication methods for large-scale, patterned graphene films face challenges in reproducibility, homogeneity, and precise pattern control.
Purpose of the Study:
- To develop a simple, scalable, and controllable fabrication technique for flexible transparent graphene electrodes.
- To demonstrate reproducible patterning of graphene with controlled feature sizes and shapes on plastic substrates.
Main Methods:
- Utilized ascorbic acid-assisted chemical reduction for large-scale graphene production with solution processability.
- Employed oxygen plasma etching in a capacitively coupled plasma (CCP) system for reproducible graphene patterning.
- Fabricated flexible transparent graphene electrodes on plastic substrates.
Main Results:
- Achieved a graphene electrode conductivity of 80 S cm⁻¹ and transparency of 76%.
- Demonstrated excellent flexibility, maintaining performance after hard bending (±175°) and repeated bending cycles.
- Successfully integrated a light-emitting diode (LED) circuit on the patterned graphene film.
Conclusions:
- The developed oxygen plasma etching technique provides a scalable and controllable method for fabricating flexible transparent graphene electrodes.
- The graphene electrodes exhibit competitive electrical and optical properties along with superior mechanical flexibility.
- This approach shows significant potential for applications in next-generation flexible electronic devices.
