Feasibility of a 90° electric sector energy analyzer for low energy ion beam characterization

A simple formula to calculate refocusing by locating the output slit at a specific distance away from the exit of 90° ion deflecting electric sector is given. Numerical analysis is also performed to calculate the ion beam trajectories for different values of the initial angular deviation of the beam. To validate the theory, a compact (90 mm × 5.5 mm × 32 mm) 90° sector ESA is fabricated which can fit through the inner diameter of a conflat 70 vacuum flange. Experimental results show that the dependence of resolution upon the distance between the sector exit and the Faraday cup agrees with the theory. The fabricated 90° sector electrostatic energy analyzer was then used to measure the space resolved ion energy distribution functions of an ion beam with the energy as low as 600 eV.