Influence of surface stresses on indentation response.

J Buchwald1, S G Mayr

  • 1Leibniz-Institut für Oberflächenmodifizierung e.V. (IOM), Permoserstr. 15, D-04318 Leipzig, Germany.

Nanotechnology
|March 5, 2015
PubMed
Summary

Surface stresses significantly alter thin film elastic properties. This study models these effects using computational methods, finding a consistent reduction in indentation modulus for silicon and strontium titanate, regardless of indenter shape.

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