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Updated: Apr 16, 2026

Atom Probe Tomography Analysis of Exsolved Mineral Phases
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HAADF-STEM atom counting in atom probe tomography specimens: Towards quantitative correlative microscopy.

W Lefebvre1, D Hernandez-Maldonado1, F Moyon1

  • 1UR, Université de Rouen, GPM, UMR CNRS 6634 BP 12, Avenue de l'Université, 76801 Saint Etienne de Rouvray, France.

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Summary

This study explores using quantitative high angle annular dark field scanning transmission electron microscopy on atom probe tomography specimens. It shows that this method provides valuable data for refining atomic-scale tomography results.

Keywords:
Atom countingAtom probe tomographyCorrelative microscopyHAADFSTEM

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Analytical Chemistry

Background:

  • Atom probe tomography (APT) specimens have unique geometries differing from standard scanning transmission electron microscopy (STEM) foils.
  • Correlative analysis requires understanding the geometric limitations and benefits of APT specimens for techniques like STEM.

Purpose of the Study:

  • To investigate the feasibility of applying quantitative high angle annular dark field scanning transmission electron microscopy (HAADF-STEM) to APT specimens.
  • To assess the impact of electron probe convergence and point spread function deconvolution on HAADF-STEM imaging of APT tips.
  • To explore the potential of HAADF-STEM for atom counting in APT specimens.

Main Methods:

  • Simulations of electron probe propagation and image formation.
  • Quantitative HAADF-STEM imaging of APT specimens.
  • Analysis of electron probe convergence effects.
  • Application of point spread function deconvolution.

Main Results:

  • HAADF-STEM can be quantitatively applied to APT specimens, despite their curved and thicker geometry.
  • Electron probe convergence and deconvolution significantly influence HAADF-STEM image quality and quantitative accuracy.
  • Atom counting in APT specimens using HAADF-STEM is demonstrated for the first time.
  • Single projections of HAADF-STEM imaging provide valuable quantitative information.

Conclusions:

  • Quantitative HAADF-STEM offers a complementary approach to enhance correlative analysis with APT.
  • This method refines atomic-scale tomography data by incorporating information from HAADF-STEM projections.
  • Opens new avenues for atomic-scale characterization using correlative microscopy techniques.