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A two-layer linear piezoelectric micromotor.

Xiaotian Li, Penghong Ci, Guoxi Liu

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|March 14, 2015

Summary

This summary is machine-generated.

A novel piezoelectric ultrasonic linear micromotor was developed for microoptics. This compact device achieves high thrust and velocity, enabling precise bidirectional motion for micro-positioning applications.

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Area of Science:

Materials Science
Mechanical Engineering
Electrical Engineering

Background:

Piezoelectric ultrasonic motors offer advantages in miniaturization and precision.
Microoptics applications require highly accurate and compact driving mechanisms.

Purpose of the Study:

To develop and characterize a novel two-layer piezoelectric ultrasonic linear micromotor.
To evaluate its performance for microoptics driving applications.

Main Methods:

Fabrication of a micromotor using two Pb(Zr,Ti)O3 (PZT-5) plates.
Operation in single-phase (standing wave) and two-phase (traveling wave) modes.
Measurement of thrust, velocity, and driving force.

Main Results:

The micromotor achieved a maximum thrust of 0.30 N.
A high unit volume direct driving force of 15 mN/mm(3) was obtained.
Linear movement velocity reached up to 230 mm/s at 174 kHz resonance frequency.

Conclusions:

The developed piezoelectric micromotor is suitable for microoptics driving.
Its compact size and high performance demonstrate potential for micro-positioning systems.
Bidirectional linear motion was successfully achieved via friction drive.