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Depth profilometry via multiplexed optical high-coherence interferometry.

Farnoud Kazemzadeh1, Alexander Wong1, Bradford B Behr2

  • 1Department of Systems Design Engineering, University of Waterloo, Ontario, Canada.

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|March 25, 2015
PubMed
Summary
This summary is machine-generated.

This study demonstrates depth profilometry using a novel Multiplexed Optical High-coherence Interferometry (MOHI) instrument. The MOHI system achieves 40 μm resolution for non-destructive sub-surface profiling in industrial applications.

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Area of Science:

  • Optical Engineering
  • Metrology
  • Materials Science

Background:

  • Depth profilometry is crucial for non-destructive sub-surface analysis in industries like defect detection and corrosion assessment.
  • Existing methods may have limitations in resolution, imaging depth, or decoupling of axial and lateral measurements.

Purpose of the Study:

  • To investigate the feasibility of depth profilometry using a Multiplexed Optical High-coherence Interferometry (MOHI) instrument.
  • To evaluate the performance characteristics of the MOHI instrument for sub-surface profiling.

Main Methods:

  • Utilized a MOHI instrument leveraging laser spatial coherence and light interferometry.
  • The instrument multiplexes 480 1D interferograms for depth reflectivity profiling.
  • Achieved decoupled axial and lateral resolutions of 40 μm and a maximum imaging depth of 700 μm.

Main Results:

  • Successfully generated depth profiles for sand-blasted aluminum, NBK7 glass, and an optical phantom.
  • Demonstrated the capability of the MOHI instrument to perform accurate depth profilometry.
  • Confirmed the decoupling of axial and lateral resolutions and the specified imaging depth.

Conclusions:

  • The MOHI instrument is a feasible tool for advanced depth profilometry.
  • The technology shows promise for various industrial applications requiring non-destructive sub-surface analysis.
  • Further development could enhance its utility in defect detection, corrosion assessment, and dental applications.