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A CMOS pressure sensor tag chip for passive wireless applications.

Fangming Deng1,2, Yigang He3, Bing Li4

  • 1School of Electrical and Electronic Engineering, East China Jiao Tong University, Nanchang 330013, China. dengfangming@ecjtu.jx.cn.

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This study introduces a novel monolithic pressure sensor tag for wireless applications, utilizing an ultra-high frequency RFID system. The sensor achieves high sensitivity and low power consumption, enabling efficient passive wireless pressure monitoring.

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Area of Science:

  • Electrical Engineering
  • Sensor Technology
  • Microelectronics

Background:

  • Passive wireless sensors are crucial for remote monitoring in various applications.
  • Existing pressure sensor tags often face limitations in sensitivity, power efficiency, or integration.

Purpose of the Study:

  • To develop a novel monolithic pressure sensor tag for passive wireless applications.
  • To enhance sensitivity and reduce power consumption in RFID-based pressure sensing.

Main Methods:

  • Implementation of a pressure sensor element in a 0.18 µm CMOS process with sacrificial layer release.
  • Design of a three-stage rectifier with auxiliary floating rectifier cells for improved power conversion efficiency.
  • Utilizing a phase-locked loop architecture with fully-digital blocks for the capacitive sensor interface.

Main Results:

  • Achieved a sensitivity of 1.2 fF/kPa within the 0-600 kPa range.
  • Demonstrated a power conversion efficiency of 53% at -20 dBm input power.
  • Obtained a 7.4 bits resolution with 0.8 µW power dissipation at 0.8 V supply voltage, totaling 3.2 µW.

Conclusions:

  • The developed monolithic pressure sensor tag offers a promising solution for passive wireless pressure monitoring.
  • The sensor exhibits excellent sensitivity, high power conversion efficiency, and low power dissipation.
  • The integration of CMOS technology and RFID enables a cost-effective and efficient sensing system.