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Updated: Apr 15, 2026
Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Broadband and high sensitive time-of-flight diffraction ultrasonic transducers based on PMNT/epoxy 1-3 piezoelectric
Dongxu Liu1,2, Qingwen Yue3,4, Ji Deng5,6
1Key Laboratory of Inorganic Functional Materials and Devices, Shanghai Institute of Ceramics, University of Chinese Academy of Sciences, 215 Chengbei Road, Jiading, Shanghai 201800, China. liudxu@outlook.com.
Abstract:
5-6 MHz PMNT/epoxy 1-3 composites were prepared by a modified dice-and-fill method. They exhibit excellent properties for ultrasonic transducer applications, such as ultrahigh thickness electromechanical coupling coefficient k(t) (85.7%), large piezoelectric coefficient d33 (1209 pC/N), and relatively low acoustic impedance Z (1.82 × 107 kg/(m2·s)). Besides, two types of Time-of-Flight Diffraction (TOFD) ultrasonic transducers have been designed, fabricated, and characterized, which have different matching layer schemes with the acoustic impedance of 4.8 and 5.7 × 106 kg/(m2·s), respectively. In the detection on a backwall of 12.7 mm polystyrene, the former exhibits higher detectivity, the relative pulse-echo sensitivity and -6 dB relative bandwidth are -21.93 dB and 102.7%, respectively, while the later exhibits broader bandwidth, the relative pulse-echo sensitivity and -6 dB relative bandwidth are -24.08 dB and 117.3%, respectively. These TOFD ultrasonic transducers based on PMNT/epoxy 1-3 composite exhibit considerably improved performance over the commercial PZT/epoxy 1-3 composite TOFD ultrasonic transducer.
