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Updated: Apr 15, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Self-adaptive vibrometry with CMOS-LCOS digital holography
Abstract:
A self-adaptive interferometer based on digital holography is here reported for applications involving measurements of very small amplitude vibrations. The two-beam coupling gain is optimized through an electronic feedback, while the dynamic character of the hologram allows reaching a high sensitivity of the interferometric measurements even in unstable environments and with strongly distorted wave-fronts. The frequency bandwidth of the adaptive interferometer and its spatial resolution are determined, respectively, by the maximum frame rate and the pixel size of the camera and of the spatial light modulator used to build the digital holographic setup.
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